- 尺寸參數(shù)
- 產(chǎn)品特性
邁格諾科提供快速、高質(zhì)量且有制造能力保證的半導(dǎo)體設(shè)備真空閥門維保服務(wù)。我們不僅僅是一家半導(dǎo)體核心精密零組件及真空閥門和特氣管路的供應(yīng)商，并且是一家擁有全套的檢測設(shè)備、豐富的維修經(jīng)驗(yàn)、專業(yè)的技工團(tuán)隊(duì)的半導(dǎo)體設(shè)備真空閥門維保廠家。邁格諾科有能力維修業(yè)內(nèi)各廠家的真空閥門如日本SMC全系列真空角閥、矩形傳輸閥；瑞士VAT全系列真空閘閥、真空蝶閥、真空門閥;美國MKS全系列角閥、蝶閥。以及V-TEX、AMAT、NC、HVA等眾多品牌。我們能夠修復(fù)受損的閥門零件和結(jié)構(gòu)，也能重新制造標(biāo)準(zhǔn)真空閥門及提供閥門維修零件包。
邁格擁有完整的半導(dǎo)體潔凈等級維修流程及標(biāo)準(zhǔn)的維修作業(yè)程序，來保證客戶的真空閥能夠正常運(yùn)作并效恢復(fù)效能。
為了確保每一個維修過的產(chǎn)品功能如新，我們盡可能采用原廠的材料及標(biāo)準(zhǔn)。為此，我們配備眾多國際一線的專業(yè)的檢測設(shè)備，如美國奧林巴斯光譜儀、?？怂箍等鴺?biāo)、硬度計(jì)、英福康檢漏儀、閥門壽命測試設(shè)備以及滿足SEMI標(biāo)準(zhǔn)，通過第三方認(rèn)證百級潔凈間等。
如有需求，請聯(lián)系我們的服務(wù)郵箱[email protected]
| 產(chǎn)業(yè)類別 | 制程區(qū)域 | 設(shè)備制造商 | 型號 | 制程 | 閥門制造商 | 產(chǎn)品編號 | 產(chǎn)品名稱 | 原廠料號/規(guī)格 | 產(chǎn)品圖片 |
| 半導(dǎo)體 | T/F | AMAT | Endura 5500 | CVD-TiN | AMAT | TPV-001 | 8"TxZ Throttle Valve |
0010-09035 0010-37768 0010-09035 0010-38027 |
|
| 半導(dǎo)體 |
T/F ETCH |
AMAT | P-5000 | W-CVD | AMAT | TPV-002 | 6"WCVD Throttle Valve | 0010-10082 |
|
| 半導(dǎo)體 | T/F | AMAT | Centura II | TIV | AMAT | TPV-003 | 12"BWCVD Throttle valve |
0010-17151 0040-05469 0040-09022 |
|
| 半導(dǎo)體 | T/F | AMAT |
P-5000 Centura5200 |
SSIN BPSG DARC C TEOS SA-CVD |
AMAT | TPV-004 | 6"SA Throttle Valve |
|
|
| 半導(dǎo)體 | T/F | AMAT | Centura 5200 |
TEOS SA-CVD |
AMAT | TPV-005 |
8"SA-CVD Throttle Valve 8"TEOS/DxZ ThrottleValve |
0010-10778 0090-0034-001 |
|
| 半導(dǎo)體 | T/F | AMAT | P-5000 | TEOS | AMAT | TPV-006 | 6"TEOS Throttle Valve | 0010-09301 |
|
| 半導(dǎo)體 | T/F | AMAT | Endura 5500 | Copper Seed | AMAT | TPV-007 | PC3 Throttle Valve |
0240-28146 0010-09019 |
|
| 半導(dǎo)體 | T/F | AMAT | Centura 5200 |
SA-CVD TEOS |
AMAT | TPV-013 | Centura Σ | 0010-02142 |
|
| 半導(dǎo)體 | T/F | AMAT | Producer |
SA-CVD BPSG |
AMAT | TPV-015 | SA Producer Throttle valve |
0010-09857 0010-26231-001 0010-37140 |
|
| 半導(dǎo)體 | T/F | AMAT | P-5000 | Nitride | AMAT | TPV-020 | 6"Nitride Throttle valve | 0010-76175 |
|
| 半導(dǎo)體 | T/F | AMAT | Centura.12" | PCV | AMAT | TPV-036 | HDP Throttle vavle | PK243A2A-SG36 |
|
| 半導(dǎo)體 | ETCH | AMAT | Centura 5200 | Poly | AMAT | TPV-109 | MxP / Super-E ChamberThrottle Valve |
|
|
| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | HDP | AMAT | TPV-111 | DDTV. Throttle Valve | 0010-08384-12939900-166 |
|
| 半導(dǎo)體 | T/F | AMAT |
Endura 5500 Centura 5200 |
Mainfiram | AMAT | SVA-001 |
8"Bellows assembly Slitvalve (TSMC 料號 30026688) |
0020-22412、0010-26966 0010-01287、0020-20345 0010-15287、0010-76428 |
|
| 半導(dǎo)體 | ETCH | AMAT | Centura 5200 |
WAFER.LIFT, ASSEMBLY, Preclean 2 |
AMAT | SVA-002 | Slit Valve Bellow Assembly | 0010-20753 |
|
| 半導(dǎo)體 | D/F | RTP | AMAT | SVA-016 | Slit Valve | 0040-75863 REV003 |
|
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| 半導(dǎo)體 | T/F | AMAT |
Endura 5500 Endura Il |
SPD | AMAT | SVA-102 | 300mm Slit Valve Assembly | 3020-00077 |
|
| 半導(dǎo)體 | D/F | AMAT | RTO-06 | DPN | AMAT | SVA-103 | DPN Chamber Imner DoorA ssembly | NCDO2B50-75DC |
|
| 半導(dǎo)體 | T/F | Novellus | INOVA | VAT | SVA-107 | Slit Valve |
03012-LA24-0001 02112-BA24-APNI |
|
| 產(chǎn)業(yè)類別 | 制程區(qū)域 | 設(shè)備制造商 | 型號 | 制程 | 閥門制造商 | 產(chǎn)品編號 | 產(chǎn)品名稱 | 原廠料號/規(guī)格 | 產(chǎn)品圖片 | ||||||||
| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | PVD | VAT | GAT-001 | Gate Valve |
0190-35101 (17432-kf21-1001) |
|
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| 半導(dǎo)體 | D/F | HVA | Quantum | IMP | HVA | GAT-002 | Cryo-Pump Gate Valve | 11210-1201r-002 |
|
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| 半導(dǎo)體 | T/F | Novellus | Vector | HDP | SMC | GAT-003 | L-Motion Gate Vlave |
XGT-300-30 60-251903-00 XGT312-50336-1A |
|
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| 半導(dǎo)體 | D/F | Varian | Viision | IMP | VAT | GAT-004 |
Source Turbo-pump Gate valve |
14048-PE44 |
|
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| 半導(dǎo)體 | D/F | Varian | EHP1500 | IMP | VAT | GAT-005 | Cryo-pump gate valve | 12150-PA44 |
|
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| 半導(dǎo)體 | T/F | Novellus | INOVA | PVD | VAT | GAT-006 | Valve Gate KF63,2.5 inch | 14036-PE24-ARV1 |
|
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| 半導(dǎo)體 | T/F | TEL | Vector | HDP | SMC | GAT-007 | L-Motion Gate Vlave | XG312-50336-1F-X179 |
|
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| 半導(dǎo)體 | T/F | TEL | CVD | V-TEX | GAT-008 | Roll cam Gate Valve | CX12-000004-21 |
|
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| 半導(dǎo)體 | T/F | AMAT | CVD | V-TEX | GAT-009 | Roll cam Gate Valve | CX12-000002-31 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer |
EDWARDS MANUAL |
VAT | GAT-010 | VALVE ISO100 | B90000220 |
|
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| 半導(dǎo)體 | T/F | AMAT | Endura Il | CVD-TIN | VAT | GAT-011 | VALVE ISO100 | G09290620 |
|
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| 半導(dǎo)體 | T/F | AMAT | Endura Il |
PNEUMATIC 8"CF RPG |
VAT | GAT-012 | Gate Vlave |
10846-UE24-ALK1 10846-XE28-AAX2 |
|
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| 半導(dǎo)體 | D/F | Axcelis | NV-GSD | IMP | - | GAT-013 | Gate Vlave | 10562-29-95 |
|
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| 半導(dǎo)體 | D/F | Axcelis | HE MP | IMP | VAT | GAT-014 | Gate Vlave |
08038-FA24-1002 08140-FA24-A1B1 |
|
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| 半導(dǎo)體 | D/F | Vista | 80810 | IMP | VAT | GAT-015 | Gate Vlave | 9400X-XA240-ABV2 |
|
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| 半導(dǎo)體 | T/F | - | - | - | VAT | GAT-016 | Gate Vlave | N03933800.GV1075N1 |
|
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| 半導(dǎo)體 | T/F | - | - | - | VAT | GAT-017 | Gate Vlave | 14040-PE44 |
|
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| 半導(dǎo)體 | T/F | ASM | HVA | - | HVA | GAT-018 | Gate Vlave | 11212-0203 |
|
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| 半導(dǎo)體 | D/F | Varian | E500 | IMP | VAT | GAT-019 | Source and beamlinegate valve | 12036-PA14-0002 |
|
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| 半導(dǎo)體 | D/F | TEL | ALPHA | 303I | HVA | GAT-020 | HAND Valve手動閥 | 11110-0603 |
|
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| 半導(dǎo)體 | T/F | Novellus | VAT | - | VAT | GAT-021 | SEALKITVALVE阻隔閥 | 01034KE24-1003 |
|
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| 半導(dǎo)體 | D/F | Vista | 80 | - | VAT | GAT-022 | turbo-pump gate avlve | 12144-PA24-AFT1 |
|
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| 半導(dǎo)體 | D/F | Axcelis | HE3 | V2 | VAT | GAT-023 | HEI V2 Valve | 08038-FA24-1002 |
|
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| 半導(dǎo)體 | T/F | ASM | - | - | HVA | GAT-024 | Gate Valve | 11110-0203 |
|
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| 半導(dǎo)體 | VAT | GAT-025 | Pendulum Valve | 65046-PA |
|
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| 半導(dǎo)體 | Nor-Cal | GAT-026 | Pendulum Valve | 3870-04672 |
|
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| 半導(dǎo)體 | VAT | GAT-027 | Pendulum Valve | 65050 |
|
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| 半導(dǎo)體 | VAT | GAT-028 | Pendulum Valve | 16548-PA21 |
|
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| 半導(dǎo)體 | T/F | NVLs/AMAT | ETCH | VAT | GAT-029 | Pendulum Valve | 65040-PA52-AWV1 |
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| 半導(dǎo)體 | T/F | VAT | GAT-030 | Gate Valve | 64040-PE52-1009 |
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| 半導(dǎo)體 | ETCH | ETCH | VAT | GAT-031 | Gate Valve | 12046-PE24-AAG1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura | VAT | GAT-032 | Gate Valve | 12048-PA44 |
|
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| 半導(dǎo)體 | ETCH | ASM | ETCH | HVA | GAT-033 | Gate Valve | 13210-0153 |
|
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| 半導(dǎo)體 | D/F | AMAT | HVA | GAT-034 | Gate Valve | 21251-10037-001 |
|
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| 半導(dǎo)體 | T/F | VAT | GAT-035 | Gate Valve | 12146-PA24-AGK1 |
|
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| 半導(dǎo)體 | D/F | TEL | HVA | GAT-036 | Gate Valve | GVI160P |
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| 半導(dǎo)體 | T/F | VISTA810 | VAT | GAT-037 | Gate Valve | VGA160IEP1 |
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| 半導(dǎo)體 | VAT | GAT-038 | Gate Valve | 65046-JH52-ADI2 |
|
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| 半導(dǎo)體 | T/F | Producer GT | VAT | GAT-039 | Gate Valve COMBO 控壓閥 | 95238-PAGO-ADH1 |
|
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| 半導(dǎo)體 | T/F | VAT | GAT-040 | Gate Valve | 16852-JA28-ACY1 |
|
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| 半導(dǎo)體 | GAT-041 | Gate Valve | 3870-03243 | ||||||||||||||
| 半導(dǎo)體 | E-GUN | HVA | GAT-042 | Gate Valve |
|
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| 半導(dǎo)體 | ETCH | LAM | VAT | GAT-043 | Pendulum Valve | 65048-PH52-AFS1 |
|
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| 半導(dǎo)體 | T/F | Nor-Cal | GAT-044 | Pendulum Valve | 3870-00998 |
|
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| 半導(dǎo)體 | T/F | ULVAC | Z-1000 | VAC | HVA | GAT-101 | SLIT Gate Valve | 02010BA-24-86557 |
|
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| 半導(dǎo)體 | D/F | TEL | VAT | VAT | GAT-102 | Gate Valve | 12044-PA24-1002 |
|
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| 半導(dǎo)體 | D/F | AMAT | Centura | L/ Trubo TXZ | VAT | GAT-103 | Gate Valve | 08040-FA24AAJ1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura | MO | VAT | GAT-104 | Gate Valve | 12040-PA24-ABZ1 |
|
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| 半導(dǎo)體 | ETCH | AMAT | Centura | POLY | VAT | GAT-105 | Gate Valve | 12040-FE24-1004 |
|
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| 半導(dǎo)體 | T/F | ASM |
EAGLE-10 TEOS |
UNICAM | V-TEX | GAT-106 | Gate Valve |
|
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| 半導(dǎo)體 | T/F | VAT | HDP | VAT | GAT-107 | Gate Valve | 10846-UE24-AAM1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | SA CVD | HVA | GAT-108 | Valve Gate3"N/CW/ 0-0373 | 021010-1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Endura 5500 | CVD-TiN | AMAT | TPV-001 | 8"TxZ Throttle Valve |
0010-09035 0010-37768 0010-09035 0010-38027 |
|
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| 半導(dǎo)體 |
T/F ETCH |
AMAT | P-5000 | W-CVD | AMAT | TPV-002 | 6"WCVD Throttle Valve | 0010-10082 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura II | TIV | AMAT | TPV-003 | 12"BWCVD Throttle valve |
0010-17151 0040-05469 0040-09022 |
|
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| 半導(dǎo)體 | T/F | AMAT |
P-5000 Centura5200 |
SSIN BPSG DARC C TEOS SA-CVD |
AMAT | TPV-004 | 6"SA Throttle Valve |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 |
TEOS SA-CVD |
AMAT | TPV-005 |
8"SA-CVD
Throttle Valve 8"TEOS/DxZ ThrottleValve |
0010-10778 0090-0034-001 |
|
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| 半導(dǎo)體 | T/F | AMAT | P-5000 | TEOS | AMAT | TPV-006 | 6"TEOS Throttle Valve | 0010-09301 |
|
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| 半導(dǎo)體 | T/F | AMAT | Endura 5500 | Copper Seed | AMAT | TPV-007 | PC3 Throttle Valve |
0240-28146 0010-09019 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer |
PECVD OXIDE |
MKS | TPV-008 | Producer Valve |
253B-16083 253B-15083 253B-21977 253B-26661 253B-14340 |
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | HTF | MKS | TPV-009 |
HTF
Process Chamber PCV Valve RTP Buffer Chamber PCV Valve |
253B-11203 253B-13964 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | HTF | MKS | TPV-010 |
HTF
Process Chamber PCV Valve RTP Buffer Chamber PCV Valve |
253B-14570 253B-20-40-1 253B-16182 |
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| 半導(dǎo)體 | ETCH | GaSonic/IPC | L3500 | Asher | MKS | TPV-011 | Asher Chamber Throttle valve | 253B-11020 |
|
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| 半導(dǎo)體 | T/F | Novellus | C1 |
PECVD SiH4 |
MKS | TPV-012 | Load Lock Throttle valve 2" KF50 253A |
253A-12457 253B-13264 |
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 |
SA-CVD TEOS |
AMAT | TPV-013 | Centura Σ | 0010-02142 |
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| 半導(dǎo)體 | ETCH | PSC | PSC | Asher | MKS | TPV-014 | Producer Valve | 96045136L |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer |
SA-CVD BPSG |
AMAT | TPV-015 | SA Producer Throttle valve |
0010-09857 0010-26231-001 0010-37140 |
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| 半導(dǎo)體 | T/F | MKS | Producer | MKS | MKS | TPV-016 | Throttle valve | 653B-18552 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | IISG | MKS | TPV-017 | PCV Throttle Valve |
253B-14579 253B-12237 |
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| 半導(dǎo)體 | T/F | AMAT | Producer | BSG | MKS | TPV-018 | PE Throttle valve | 683B-24562 |
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| 半導(dǎo)體 | T/F | AMAT | Producer | USG | MKS | TPV-019 | SA Throttle vlave | 683B-23795 |
|
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| 半導(dǎo)體 | T/F | AMAT | P-5000 | Nitride | AMAT | TPV-020 | 6"Nitride Throttle valve | 0010-76175 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer SE | SA-CVD | MKS | TPV-021 | MKS SA Throttle valve |
683B-26033 683B-24617 |
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| 半導(dǎo)體 | T/F | AMAT | DPSII | URBO PUM | MKS | TPV-022 | ISOValve | 153F-16063 |
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| 半導(dǎo)體 | T/F | AMAT | Tylan | TPV-023 | Throttle vavle | PH265-02 |
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| 半導(dǎo)體 | T/F | AMAT | Tylan | TPV-024 | Throttle vavle | MX4OJIK18SIN |
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| 半導(dǎo)體 | T/F | AMAT | MKS | TPV-025 | Throttle vavle | 253B |
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| 半導(dǎo)體 | T/F | AKT |
AKT 4300/5500 |
AKT 4300/5500 |
MKS | TPV-026 | Throttle vavle | 653B-13071 |
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| 半導(dǎo)體 | T/F | AKT |
AKT 4300/5500 |
AKT 4300/5500 |
MKS | TPV-027 | Throttle vavle | 653B-22815 |
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| 半導(dǎo)體 | T/F | AMAT | producer | HDP Chamber | MKS | TPV-028 | Throttle vavle | 153D-15973 |
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| 半導(dǎo)體 | T/F | AMAT | producer | HDP Chamber | MKS | TPV-029 | Throttle vavle | 153D-15006 |
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| 半導(dǎo)體 | T/F | LAN |
LAN
9400 Novellus C1 |
Polly | MKS | TPV-030 | Throttle vavle | 253B-13264 |
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| 半導(dǎo)體 | T/F | AMAT | MKS | TPV-031 | Throttle vavle | RSX-S |
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| 半導(dǎo)體 | T/F | AMAT | MKS | TPV-032 | Throttle vavle | RSX-100J |
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| 半導(dǎo)體 | T/F |
AVIZA ALD |
TTV | PCV | MKS | TPV-034 | Throttle vavle | T3BIA-25947 |
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| 半導(dǎo)體 | T/F | TEL | ALPHA 303 | PCV | MKS | TPV-035 | Throttle vavle | 2020448-001(T3BIA27547) |
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| 半導(dǎo)體 | T/F | AMAT | Centura.12" | PCV | AMAT | TPV-036 | HDP Throttle vavle | PK243A2A-SG36 |
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| 半導(dǎo)體 | T/F | Novellus | NC | Nor-Cal | TPV-037 | Throttle vavle | 22-2844 |
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| 半導(dǎo)體 | T/F | AMAT | Centura | PCV | MKS | TPV-038 | Throttle vavle | 253B-24627 |
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| 半導(dǎo)體 | T/F | SA | MKS | TPV-039 | Throttle vavle | T3BIA-27242 |
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| 半導(dǎo)體 | T/F | AMAT | Centura | RTP | MKS | TPV-040 | DIG EXH THROTTLEDNET 2"Flapper w | T3BIA-26711 |
|
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| 半導(dǎo)體 | T/F | TEL | DWTWSI | APC | MKS | TPV-041 | Throttle vavle | HV-50N |
|
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| 半導(dǎo)體 | T/F | AMAT | PCV | MKS | TPV-042 | Throttle vavle | S00106867 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | MKS | TPV-045 | Throttle vavle | 653B-14814 |
|
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| 半導(dǎo)體 | T/F | ULVACE |
PSK 韓國去光阻 |
PSK | MKS | TPV-046 | Throttle vavle | 653B-4-100-2 |
|
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| 半導(dǎo)體 | T/F | ULVACE | MKS | TPV-047 | Throttle vavle | T3BIA-27921 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura | MKS | TPV-048 | Throttle vavle | 683B-26871 |
|
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| 半導(dǎo)體 | D/F | AMAT | RTP MF | PCV | Nor-Cal | TPV-049 | Throttle vavle | 3870-04672 |
|
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| 半導(dǎo)體 | T/F |
LAM BEVEL |
MKS | TPV-051 | Throttle vavle | 253B-26766 |
|
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| 半導(dǎo)體 | T/F | Tylan | TPV-053 | Throttle vavle | MDVX030IT |
|
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| 半導(dǎo)體 | D/F | TPV-054 | Throttle vavle | T3BIA-27547 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | SA-CVD | TPV-101 | Throttle vavle |
|
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| 半導(dǎo)體 | T/F | TEOS | MKS | TPV-102 | Throttle vavle | 683B |
|
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| 半導(dǎo)體 | ETCH | TEL |
85
DRM / 88 SCCM |
Poly Etch | VAT | TPV-103 | Throttle vavle | 61144-PH52-AAM1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | PCV | MKS | TPV-106 | 253B |
|
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| 半導(dǎo)體 | T/F | TEL | EP | Ti2C14 | Tylan | TPV-107 | APC valve | MX50KFV15SSN | |||||||||
| 半導(dǎo)體 | D/F | AMAT | Producer | TEOS | MKS | TPV-108 | Producer Valve |
253B-23957 253B-26278 |
|
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| 半導(dǎo)體 | ETCH | AMAT | Centura 5200 | Poly | AMAT | TPV-109 | MxP / Super-E ChamberThrottle Valve |
|
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| 半導(dǎo)體 | T/F | AMAT | Centura 5200 | HDP | AMAT | TPV-111 | DDTV. Throttle Valve | 0010-08384-12939900-166 |
|
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| 半導(dǎo)體 | T/F | AMAT | Novellus | HDp | MKS | TPV-112 | Throttle valve | 253B-15665 |
|
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| 半導(dǎo)體 | T/F | Novellus | Sequel | CVD | MKS | TPV-113 | BTILN Buffer Chamnber PCV | 253B-20401 |
|
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| 半導(dǎo)體 | T/F | AMAT | RTP | CORA | MKS | TPV-114 | APC Throttle Valve. | 253B-2-50-1 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | HDP | MKS | TPV-117 | WTS Throttle Valve | :253B-15416 |
|
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| 半導(dǎo)體 | T/F | WL | WIT1000 | CVD | MKS | TPV-118 | Throttle Valve NKS | 253B-11102 |
|
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| 半導(dǎo)體 | T/F | AMAT |
Endura
5500 Centura 5200 |
Mainfiram | AMAT | SVA-001 |
8"Bellows
assembly Slitvalve (TSMC 料號 30026688) |
0020-22412、0010-26966 0010-01287、0020-20345 0010-15287、0010-76428 |
|
||||||||
| 半導(dǎo)體 | ETCH | AMAT | Centura 5200 |
WAFER.LIFT, ASSEMBLY, Preclean 2 |
AMAT | SVA-002 | Slit Valve Bellow Assembly | 0010-20753 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | VAT | SVA-003 | L/Ldoor |
0750XUE24-AAL8/0273 0010-01711 0010-01711 |
|
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| 半導(dǎo)體 | T/F | ULVAC | ENTRON | V-TEX | SVA-004 | Slit Valve Cylinder | 02110-BA24 |
|
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| 半導(dǎo)體 | T/F | AMAT | Producer | VAT | SVA-005 | Slit valve Bellows Assembly | 07512-UA24 |
|
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| 半導(dǎo)體 | T/F | TEL | V-TEX | V-TEX | SVA-006 | V-TEX GATE Valve |
|
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| 半導(dǎo)體 | T/F | ULVAC | ULVAC | PVD | VAT | SVA-008 | SLIT Gate Valve | NKV2-12U(50x336) |
|
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| 半導(dǎo)體 | D/F | VAT | SVA-009 | DPN Slit Door | 0040-44818REV004 |
|
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| 半導(dǎo)體 | ETCH | TEL | V-TEX | SVA-010 | TEL SHUT DOORASSY | 280-00081-11 |
|
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| 半導(dǎo)體 | ETCH | TEL | VAT | SVA-011 | Producer GT | 0750X-UA24-AIP2 |
|
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| 半導(dǎo)體 | ETCH | TEL | VAT | SVA-012 |
Producer
GT. SLIT VLV ASSY S-INSRT G67P MECH+REED SW |
0340X-CA24-BMP1 |
|
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| 半導(dǎo)體 | T/F | TEL | SMC | SVA-013 | SMC Gate Valve | XGT-0402BWN-X2 |
|
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| 半導(dǎo)體 | T/F | VAT | SVA-014 | Producer SE Slit Valve Module | 0340X-CA24-BMB1 |
|
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| 半導(dǎo)體 | T/F | AMAT | V-TEX | SVA-015 | Gate Valve | NA(V060149 |
|
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| 半導(dǎo)體 | D/F | RTP | AMAT | SVA-016 | Slit Valve | 0040-75863 REV003 |
|
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| 半導(dǎo)體 | T/F | HDP | VAT | SVA-017 | Slit Valve | 243788/0371 |
|
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| 半導(dǎo)體 | D/F | VAT | SVA-019 | Gate Valve | 258798 |
|
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| 半導(dǎo)體 | VAT | SVA-020 | A-682864 |
|
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| 半導(dǎo)體 | T/F | AMAT | P5000 | CVD | VAT | SVA-101 | Slit Valve AssemblyActuator. ZA Gate | 0300-MA24 |
|
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| 半導(dǎo)體 | T/F | AMAT |
Endura
5500 Endura Il |
SPD | AMAT | SVA-102 | 300mm Slit Valve Assembly | 3020-00077 |
|
||||||||
| 半導(dǎo)體 | D/F | AMAT | RTO-06 | DPN | AMAT | SVA-103 | DPN Chamber Imner DoorA ssembly | NCDO2B50-75DC |
|
||||||||
| 半導(dǎo)體 | T/F | AMAT |
Centura
I DCA (WCVD) |
W-CVD | VAT | SVA-104 | A ssy neumatic Actuati onValve | 243786/0443 |
|
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| 半導(dǎo)體 | T/F | Novellus | Concept 2 Altus | W-CVD | SMC | SVA-105 | Prcess Vodule Slit Valve | XGT200-30-1A-X176 |
|
||||||||
| 半導(dǎo)體 | T/F | Novellus | INOVA | AMAT | SVA-107 | Slit Valve |
03012-LA24-0001 02112-BA24-APNI |
|
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| 半導(dǎo)體 | Novellus | VAT | SVA-108 | 300mm NVLS DLCM Slit Valve | 07512-UA24-ADI2 |
|
|||||||||||
| 半導(dǎo)體 | D/F | HITACHI KOKUSAI | 8 inch | MS-001 | Rotation Axis Magnetic Seal | 27975 |
|
||||||||||
| 半導(dǎo)體 | IMP | Varian |
80 E-1000 |
8 inch | MS-002 | Main Drive Shaft |
52-118199 52-121187 E19000940 |
|
|||||||||
| 半導(dǎo)體 | PECVD | Novellus | C2 | 8 inch | MS-003 | Spindle Feedthrough |
52-131938 02-106507-00 |
|
|||||||||
| 半導(dǎo)體 |
CVD D/F |
TEL | 8 inch | MS-004 | Spindle Feedthrough | 60766Z |
|
||||||||||
| 半導(dǎo)體 |
CVD D/F |
TEL | 12 inch | MS-005 | Vacuum Feedthrough | EKK046005 |
|
||||||||||
| 半導(dǎo)體 |
CVD D/F |
TEL | 8 inch | MS-006 | Vacuum Feedthrough |
024-014317-1 6011189 60770A |
|
||||||||||
| 半導(dǎo)體 | IMP | Varian | 80 | 8 inch | MS-007 | WAFHAND Feedthrough | 54-116667 |
|
|||||||||
| 半導(dǎo)體 | IMP | Axcelis | HE3 | 12 inch | MS-008 | Direct Drive Spindle Feedthrough |
11029090 1193490 (軸長445mm) |
|
|||||||||
| 半導(dǎo)體 | IMP | Axcelis | EATON | 12 inch | MS-009 | Belt Driver Spindle Feedthrough |
1180900 11S5301 (軸長369mm) |
|
|||||||||
| 半導(dǎo)體 | IMP | Axcelis | EATON | 12 inch | MS-010 | Belt Driver Spindle Feedthrough |
52-117600 (軸長357mm) |
|
|||||||||
| 半導(dǎo)體 | ETCH | Varian |
3180、3190、 3280、3290 |
Sputter | MS-011 | Retrofit sealing packages | 54-116533 |
|
|||||||||
| 半導(dǎo)體 | IMP | Varian | 80 | 8 inch | MS-012 | Mass Slit feedthough |
52-120755/E19003080 52-120756/E19003081 |
|
|||||||||
| 半導(dǎo)體 | Vecoo | MS-013 | Magnetic Seal | 57-133133 |
|
||||||||||||
| 半導(dǎo)體 | IMP | Varian | 8 inch | MS-014 | Magnetic Seal |
54-117147 52-161761 52-121656 52-121761 52-107009 52-121660 |
|
||||||||||
| 半導(dǎo)體 | IMP | Varian |
E1000 M2000 |
MS-015 | Magnetic Seal |
52-121237 E17129050 |
|
||||||||||
| 半導(dǎo)體 | IMP | Varian |
160 E500HP |
MS-016 | XP Spindle | C-F4151001 |
|
||||||||||
| 半導(dǎo)體 | MS-017 | Magnetic Seal |
51-105021 52-115736 |
|
|||||||||||||
| 半導(dǎo)體 | MS-018 | Magnetic Seal |
26622C H021776 |
|
|||||||||||||
| 半導(dǎo)體 | IMP | Varian | E220 | MS-019 | Magnetic Seal | 54-116667 |
|
||||||||||
| 半導(dǎo)體 | Novellus | MS-020 | Magnetic Seal |
V640108 CDC351 |
|
||||||||||||
| 半導(dǎo)體 | CVD | Novellus | C3 | 12 INCH | MS-021 | Vctor Spindle | 02-276537-00 |
|
|||||||||
| 半導(dǎo)體 | CVD | Novellus | C3 | 12 INCH | MS-022 | Vctor Spindle |
02-324753-00 02-312735-00 |
|
